An XYθ mechanism actuated by one actuator

This paper presents a novel type of XYθ mechanism, in which three-degree-of-freedom motion in plane could be obtained with one actuator. The principle of the mechanism is described. One application of the novel mechanism is used in flexure hinge mechanism for micro-planar robot. Because only one piezoelectric element is used and the structure of the flexure hinge mechanism is very compact, the size of the micro-planar robot is within 20 mm × 20 mm × 12 mm.