A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method

Thin film SMAs have the potential to became a primary actuating mechanism for micropumps. In this study, a micropump driven by TiNiCu shape memory thin film is designed and fabricated. The micropump is composed of a TiNiCu/Si bimorph driving membrane, a pump chamber and two inlet and outlet check valves. The property of TiNiCu films and driving capacity of TiNiCu/Si bimorph driving membrane are investigated. The film surface shows a smooth and featureless morphology without any cracks, and the hysteresis width (delta) T of TiNiCu film is about 9°C. By using the recoverable force of TiNiCu thin film and biasing force of silicon membrane, the actuation diaphragm realizes reciprocating motion effectively. Experimental results show that the micropump driving by TiNiCu film has good performance, such as high pumping yield, high working frequency, stable driving capacity, and long fatigue life time.