Polycarbonate nanoparticles spray coated on silicon substrate using micro-electromechanical-systems-based high-frequency ultrasonic nozzle

Mono-disperse polycarbonate (PC) nanoparticles 20 nm in diameter was spray coated on silicon substrate using a novel high-frequency ultrasonic nozzle. Specifically, Bisphenol-A polycarbonate with a molecular weight (Mw) of approximately 6.4 × 104 g/mol was first dissolved in pyridine. The resulting solution was sprayed into surfactant-containing de-ionized (DI) water using a 300 kHz silicon-based multiple-Fourier horn nozzle (MFHN). As pyridine was extracted into the water, PC nanoparticles formed but remained dispersed. This suspension of PC nanoparticles was then sprayed onto a silicon substrate using a 500 kHz 3-Fourier horn nozzle. Scanning electron microscopy (SEM) of the dried substrate revealed that PC nanoparticles were spread uniformly with no aggregation.