Synthesis of As-grown superconducting MgB2 thin films by sputtering method Original Research Article

As-grown superconducting MgB2 thin films were prepared by very simple RF sputtering method using a single target without post-annealing process. A two-component target comprising of many small chunks of B on a Mg disk was used. The films were deposited onto polished single crystal sapphire (R-plane) or SrTiO3 (1 1 1) substrates at rather low temperatures ranging from 100 to 110 °C. Five samples on SrTiO3 substrate and one on sapphire showed zero resistivity at about 15 K and onset at about 20 K with measuring the resistance versus temperature (R–T curves) and the current versus voltage curves (I–V curve).