Author/Authors :
Tyler R. Brosten، نويسنده , , Jong M. Park، نويسنده , , Allan T. Evans، نويسنده , , Niels Kristian Rasmussen، نويسنده , , Gregory F. Nellis، نويسنده , , Sanford A. Klein ?، نويسنده , , Jeffery R. Feller، نويسنده , , Louis Salerno، نويسنده , , Yogesh B. Gianchandani، نويسنده ,
Abstract :
This paper describes a steady numerical flow model and experimental gas flow results of a self-encapsulated, piezoelectrically actuated, cryogenic micro-valve for distributed cooling applications. Experimental flow data of the prototype micro-valve design is obtained for various gases at room temperature and for helium at near liquid nitrogen temperature. With a pressure differential of 100 kPa across the inlet and outlet, a prototype micro-valve is shown to modulate the flow of room temperature helium from 1200 to 0 sccm. Numerical flow results and experimental data agree well, with 60% of the data points falling within the range of ±10%.
