Title of article
The technology combined electrochemical mechanical polishing
Author/Authors
Yuan-Long Chen، نويسنده , , Shu-Min Zhu، نويسنده , , Shuo-Jen Lee، نويسنده , , Jong C Wang، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
3
From page
203
To page
205
Abstract
Electrochemical mechanical polishing (ECMP) is a polishing process combining electrochemical and mechanical action. It has higher efficiency and better quality.
Mechanism, processing regulation and application are introduced in the paper.
Keywords
Electrochemical polishing , Combined technology , Mechanical polishing
Journal title
Journal of Materials Processing Technology
Serial Year
2003
Journal title
Journal of Materials Processing Technology
Record number
1177774
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