Fabrication of micro-electrodes by multi-EDM grinding process

In this study, a multi-EDM grinding process is adapted to fabricate micro-electrodes. Equipments such as a wire EDM machine and a traditional CNC-EDM machine are used for machining micro-electrodes. Rod electrodes of copper with diameter 3.0 mm were cut to be 0.15 mm on wire-EDM machine at first step. EDM grinding process was used to grind micro-electrodes to fine diameter bellow 20 μm on a CNC-EDM machine at second step. For EDM grinding, rotating mechanisms are mounted on both the WEDM machine and the CNC-EDM machine. A CCD camera is provided for viewing and for on-line dimensional controlling, when micro-electrodes were cutting. Fine electrodes could be processed to a smaller size using proposed two-steps EDM grinding process. Higher L/D ratio could be also achieved by this method. The processed fine electrodes can be used for drilling micro-holes, micro-deep holes, micro-milling, micro-punching, and manufacturing of micro-nozzles.