Domain decomposition and model order reduction methods applied to the simulation of multi-physics problems in MEMS

Coupled electro-mechanical problems are frequently encountered when dealing with micro electro-mechanical systems (MEMS) with capacitive actuation and/or readout systems; their numerical solution can be extremely time consuming, due to the nonlinearity of the coupling terms. Coupled electrostatic – structural dynamic simulations are carried out in this paper through an innovative numerical procedure, based on the combined use of a domain decomposition technique and of a proper orthogonal decomposition methodology. The approach is assessed through the analysis of the dynamic response of a doubly clamped beam and of a plane resonator subjected to an electrostatic actuation, showing computational gains up to 98%.