Title of article :
In situ gas-phase FTIR monitoring of liquid delivery MOCVD process for PZT film preparation
Author/Authors :
Funakubo، Hiroshi نويسنده , , Asano، Gouji نويسنده , , Tonari، Kazuaki نويسنده , , Takamatsu، Yukichi نويسنده , , Ohtsuki، Kunio نويسنده , , Satake، Tsukasa نويسنده ,
Issue Information :
روزنامه با شماره پیاپی 2 سال 2008
Abstract :
Fourier transform infrared (FTIR) monitoring of the Pb(C11H19O2)2–Zr(C9H15O2)4–i(Oi-C3H7)2(C11H19O2)2–O2 system diluted inC8H18 solvent and used to fabricate MOCVD-Pb(Zr,Ti)O3 filmswas investigated.Noobvious gas-phase reactions between the sources and theC8H18 were detected. Analysis of the FTIR spectra of single source supply and of mixtures after removing the C8H18 spectrum showed that FTIR concentration monitoring was able to measure the concentration of source gases in a mixture by identifying the characteristic FTIR peaks.
Keywords :
MOCVD , Pb(Zr,Ti)O3 , FTIR , In situ monitoring
Journal title :
Chemical Engineering Journal
Journal title :
Chemical Engineering Journal
