Using phosphoric acid-impregnated activated carbon to improve the efficiency of chemical filters for the removal of airborne molecular contaminants (AMCs) in the make-up air unit (MAU) of a cleanroom

A coconut shell activated carbon precursor was modified by impregnation with phosphoric acid. The effects of the particle diameter of the impregnated activated carbons (IACs) on the thickness, pressure resistance, and face velocity of a chemical filter were investigated. Furthermore, volatile organic compounds (VOCs) adsorption experiments were carried out to determine the relationship between the removal efficiency and the chemical properties of the adsorbents. The effects of various parameters such as challenge gas concentration, saturated adsorption ratio, impregnation method and impregnant contents were investigated. The results showed that the effect of face velocity on pressure resistance is larger than that of the thickness, that 0.25 M phosphoric acid impregnation of activated carbon can raise VOC removal efficiency by 2–3% (toluene: from 95.8% to 98.1%, isopropanol: from 95.2 to 97.2%), and that the optimal impregnation time is around 1.5 h. A simple shaking impregnation method exhibited better performance than the ultrasonic method.