Modeling analysis of melting and solidifying processes in excimer laser crystallization of a-Si films with effective specific heat-enthalpy method

In this work, an efficient two-dimensional numerical model is built to predict the critical fluences (Fc) during the irradiation of excimer laser on a-Si films. One aim of this paper is the modeling of conduction heat transfer with phase change. The specific heat/enthalpy method is used to handle the absorption and release of latent heat. It gives reasonably accurate results, when compared with the analytical solution of the Stefan problem. From the analysis of temperature responses, the Fc (full-melt threshold) obtained from the simulation results of the proposed model agree fairly well with those from the experimental data reported in the literature. It is also found that the variation of the surface reflectivity provides a useful means to observe the phase change and melting duration.