SILICON NITRIDE NANOFIBERS PRODUCED BY THE PYROLYSIS OF SiCl4 IN H2 AND N2 MEDIA

The synthesis of fibrous Si3N4 nanostructures by gas-phase chemical deposition during the pyrolysis of silicon tetrachloride in a hydrogen and nitrogen atmosphere was investigated. It was shown that the products contained both amorphous Si3N4 nanofibers and their _ and _ phases both with and without a silicon coating. In addition to the Si3N4 nanofibers the products also contained nanoribbons.