Charge trapping phenomena in high-efficiency metal-oxide-silicon light-emitting diodes with ion-implanted oxide

This work is a comparative study of the processes of charge trapping in silicon dioxide layers doped with different rare-earth (RE) impurities (Gd, Tb, Er) as well as with Ge. Diode SiO2–Si structures incorporating such oxide layers exhibit efficient electroluminescence (EL) in the spectral range of UV to IR. Ion implantation was performed over a wide dose range with the implant profiles peaking in the middle of the oxide. Charge trapping was studied using an electron injection technique in constant current regime with simultaneous measurements of the EL intensity (ELI). High-frequency C/V characteristics were used to monitor the net charge in the oxides.