Conversion efficiency of implanted ions by confocal micro-luminescence mapping

We report on the further development of the statistical approach to determine the conversion efficiency of implanted ions into emitting centers and present the measurement method based on the confocal micro-luminescence mapping. It involves the micro-luminescence mapping with a narrow-open confocal aperture, followed by the statistical analysis of the photoluminescence signal from an ensemble of emitting centers. The confocal mapping method has two important advantages compared to the recently discussed aperture-free method (J. Lumin. 131 (2011) 489): it is less sensitive to errors in the laser spot size and has a well defined useful area. The confocal mapping has been applied to the Xe center in diamond. The conversion efficiency has been found to be about 0.28, which is in good agreement with the results of the aperture-free method.