Large aperture VCSELs with a continuous-wave output power of 1.95 W

In this study, 980 nm high-power bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) with large emission aperture are described. The devices have been fabricated by using oxidation confinement technology. Al2O3 film, instead of SiNx film, is used as the passivation layer to enhance heat dissipation. A distinguished device performance is achieved. The maximum continuous-wave (CW) output power of the large emission aperture devices with active diameters up to 500 μm is as high as 1.95 W at room temperature.