Title of article
An experimental investigation of the theory of electrostatic deflections
Author/Authors
J.I. Siddique، نويسنده , , Robert Deaton، نويسنده , , Eric Sabo، نويسنده , , John A. Pelesko، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2011
Pages
6
From page
1
To page
6
Abstract
The so-called “pull-in” instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components “pull-in” or collapse into one another. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated.
Keywords
MEMS , NEMS , Elasticmembrane , Electrostaticactuation , Pull-ininstability
Journal title
JOURNAL OF ELECTROSTATICS
Serial Year
2011
Journal title
JOURNAL OF ELECTROSTATICS
Record number
1265244
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