• Title of article

    An experimental investigation of the theory of electrostatic deflections

  • Author/Authors

    J.I. Siddique، نويسنده , , Robert Deaton، نويسنده , , Eric Sabo، نويسنده , , John A. Pelesko، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2011
  • Pages
    6
  • From page
    1
  • To page
    6
  • Abstract
    The so-called “pull-in” instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components “pull-in” or collapse into one another. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated.
  • Keywords
    MEMS , NEMS , Elasticmembrane , Electrostaticactuation , Pull-ininstability
  • Journal title
    JOURNAL OF ELECTROSTATICS
  • Serial Year
    2011
  • Journal title
    JOURNAL OF ELECTROSTATICS
  • Record number

    1265244