Chemical solution deposition of conductive SrRuO3 thin film on Si substrate

The conductive metal oxide of SrRuO3 (SRO) thin films were deposited on Si(1 0 0) substrate by spin-coating with a chemical solution deposition (CSD). A stable precursor solution could be prepared from RuCl3·2H2O as a Ru source and Sr or SrCl2 as a Sr source in 2-methoxyethanol. Highly (2 0 0)-oriented SRO films with a perovskite structure were obtained by the annealing at above 600 °C. As a result, relatively good SRO thin films could be deposited from a precursor solution of Sr and RuCl3·2H2O by annealing at 700 °C, showing a low resistivity of 1.1×10−3 Ω cm.