Modified sol–gel processing for preparation of barium strontium titanate ceramic thin films

The Ba0.7Sr0.3TiO3 (BST) thin films were prepared by sol–gel processing using barium acetate (Ba(Ac)2), strontium acetate (Sr(Ac)2) and titanium-tetrabutoxide as starting materials. Acetic acid and 2-methoxyethanol were selected as solvents, respectively. The single layer thickness of the films was about 200 nm determined by F20 filmetrics. The surface morphology of the film was observed using an atomic force microscope (AFM). X-ray diffraction (XRD) results show that the film exhibits a pure perovskite phase. The film has good dielectric properties. The dielectric constant and dielectric loss are 260 and 0.036 at 100 kHz, respectively.