Microwave dielectric properties of magnesium calcium titanate thin films

The microwave dielectric properties of CaTiO3 (CT), MgTiO3 (MT) and (Mg0.93Ca0.07)TiO3 (MCT) thin films prepared by the metalorganic solution deposition technique were investigated. The well-crystallized CT, MT and MCT thin films were annealed at 800 °C. The microwave dielectric properties of the thin films were measured using a circular-patch capacitor geometry with a network analyzer. The dielectric constant (K), dielectric loss (tan δ) and temperature coefficient of dielectric constant (TCK) of CT films measured up to 6 GHz were 160 ± 3, 0.003 ± 0.0003 and −1340 ppm/°C, respectively. In contrast, the MT films showed K ∼ 16 ± 1, tan δ ∼ 0.0008 ± 0.0001 and TCK ∼ +260 ppm/°C. MCT films exhibited microwave dielectric properties of K ∼ 22 ± 1, tan δ ∼ 0.0012 ± 0002 and TCK ∼ +10 ppm/°C.