Author/Authors :
Xianpeng Qin، نويسنده , , Guohong Zhou، نويسنده , , Hao Yang، نويسنده , , Jen-Hsien Wong، نويسنده , , Jian Zhang، نويسنده , , Dewei Luo، نويسنده , , Shiwei Wang، نويسنده , , Jan Ma، نويسنده , , Dingyuan Tang، نويسنده ,
Abstract :
High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz.
Keywords :
C. Optical properties , microstructure , transparent ceramics , YAG , Plasma resistance
