Fault localisation in ICs by goniometric laser probing of thermal induced surface waves

New methods for fault detection in ICs are needed due to new technological trends. The detection of heat generated by faults offers interesting perspectives in this respect. Periodic heat released at the surface or inside ICs generates a surface thermal wave that can be detected by appropriate laser probing at distances up to 500 (mu)m from the source. We propose in this paper a goniometric laser probing method allowing the determination of the direction and distance of a fault with respect to the probing point. © 1999 Elsevier Science Ltd. All rights reserved.