A new bifunctional topography and current probe for scanning force microscope testing of integrated circuits

A new probe for scanning force microscope testing of integrated circuits (IC) was developed enabling both investigation of topography and contactless current detection in conducting lines via evaluation of the magnetic field due to the currents by means of an anisotropic magneto-resistive (AMR) sensor. First measurements of the topography and the current detection down to 10 (mu)A with a frequency of 1 kHz are shown on a test structure containing 15 (mu)m and 4 (mu)m wide conducting lines. These promising results point out an application for advanced function and failure analysis of integrated circuits in the near future. © 1999 Elsevier Science Ltd. All rights reserved.