Silicon single-charge transfer devices Original Research Article

The single-electron device (SED) enables the control of electron motion on the level of an elementary charge. Single-charge transfer devices are special SEDs that enable single-electron transfer synchronized with the gate clock. They have the potential for extremely low transfer error rates and are expected to be building blocks for future information processing and electrical metrology. We have been pursuing the fabrication of Si-based SEDs using CMOS technology with the help of electron-beam lithography and have recently demonstrated the single-charge transfer devices. The devices are composed of one Si quantum dot sandwitched between two tiny MOS gates and can operate at much higher temperatures than those of former metal-based and compound-semiconductor-based devices. This opens up the possibility of the practical use of clocked single-charge transfer.