Failure modes in surface micromachined microelectromechanical actuation systems

In order for the rapidly emerging field of MicroElecl.roMechaiiical Systems (MEMS) to meet its extraordinary expectations regarding commercial impact, issues pertaining to how they fail must be understood. We identify and address failure modes common to a broad range of MEMS actuation systems, including adhesion (stiction) and friction-induced failures caused by improper operational methods, mechanical instabilities, and electrical instabilities. Demonstrated methods to mitigate these failure modes include implementing optimized designs, model-based operational methods, and chemical surface treatments. © 1999 Elsevier Science Ltd. All rights reserved.