Cyclopentasilane Si5H10: First single crystal X-ray structure of an oligosilane SixHy and thermal analysis with TG/MS

Cyclopentasilane Si5H10 (CPS) – a liquid silicon precursor – was crystallized in situ at − 100 °C which allowed determination of the single crystal X-ray structure, showing short intermolecular distances below the sum of the v.d.Waals radii of the corresponding atoms. Further characterization included a thermal analysis with mass spectrometry (TG/MS) of the segregated species hydrogen, mono- and disilane.