Iron sulfide films via Fe2(CO)6(μ-S2) as a MOCVD single source precursor

Fe2(CO)6(μ-S2) was used as a single source precursor in an attempt to produce FeS film via MOCVD. Pyrolysis of Fe2(CO)6(μ-S2) at temperature below 500 °C produced Fe1−xS or Fe7S8 powder as indicated by its powder X-ray spectra. At 750 °C, polycrystalline FeS powder was obtained. In film deposition, polycrystalline Fe1−xS or Fe7S8 films were obtained on Si(100) and Ag–Si(100) substrates below 500 °C. SEM micrographs showed the film on Si(100) substrate containing whisker-like grains. However, pillar-like grains were obtained on Ag–Si(100) substrate. Deposition rates are also different for different substrates as evaluated by the thickness of the films, which were obtained by SEM micrographs of the cross section of the films. At 750 °C, similar polycrystalline Fe1−xS or Fe7S8 film was obtained.