Synthesis of fluorinated α-sila-β-diketones and their copper(II) complexes

Fluorinated α-sila-β-diketones, synthesized in good yields via the Claisen condensation of the esters of fluorinated acids or fluorinated acid fluorides and the lithium enolates of acetyltrialkylsilanes, were employed in the preparation of volatile copper complexes for copper metallization. The thermal properties of the corresponding copper(II) complexes were determined by TGA and DSC to evaluate the potential of these materials as copper metal–organic chemical vapor deposition (MOCVD) precursors; the new copper compounds have greater volatility and stability than the corresponding copper complexes of non-fluorinated α-sila-β-diketonates.