Catalytic size control of multiwalled carbon nanotube diameter in xylene chemical vapor deposition process

Multiwalled carbon nanotubes (CNT) of diameters of 10–40 nm are synthesized on Fe and Co coated nm-scale catalyst support in a xylene chemical vapor deposition (CVD) process without the need for ferrocene iron source. Silica (∼40 nm diameter) and nanocrystalline Au (∼10 nm) are coated with a monolayer of amine, sulfonate, or thiol termination to ensure monolayer Fe loading, reduce Fe surface migration and reduce agglomeration of catalyst support particles during dispersion. Coordination with surface functionalization did not noticeably hinder Fe surface diffusion nor hinder catalytic activity of CNT formation. CNT diameters of ∼40 nm were seen for most chemical treatments. Functionalization of substrate (SiO2/Si) surface with carboxylic termination aided in the dispersion of amine functionalized silica nanoparticles. Another approach to limit catalytic support to nm-scale dimensions was to deposit a thin film of Co (5–25 nm thick) in a multilayer structure that after etching left a nm-scale Co line at the edge of the pattern. In the ferrocene CVD process, CNT diameters down to 10 nm are controlled directly by the catalytic metal film thickness.