A volatile Pb(II) β-Diketonate diglyme complex as a promising precursor for MOCVD of lead oxide films

A polyether adduct of the lead(II) hexafluoroacetylacetonate has been synthesized and characterized by elemental analysis, NMR spectroscopy, mass spectrometry and infrared spectroscopy. The single crystal X-ray diffraction study provides evidence of a dimeric structure of the type [Pb(hfa)2 · diglyme]2 (Hhfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedione, diglyme=CH3O(CH2CH2O)2CH3). The thermal analyses have revealed high volatility and good thermal stability with a low residue despite the dimeric nature of the adduct. This novel compound has been successfully applied as a precursor for the depositions of PbO films. It represents the first example of lead precursors that can be used in the liquid phase without decomposition, thus providing constant evaporation rates even for very long deposition times.