Author/Authors :
Erika Behrisch، نويسنده , , R and Mayer، نويسنده , , M and Jacob، نويسنده , , W and Assmann، نويسنده , , W and Dollinger، نويسنده , , G and Bergmaier، نويسنده , , A and Kreissig، نويسنده , , U and Friedrich، نويسنده , , M and Sun، نويسنده , , G.Y and Hildebrandt، نويسنده , , D and Akbi، نويسنده , , M and Schneider، نويسنده , , W and Schleuكner، نويسنده , , D and Knapp، نويسنده , , W and Edelmann، نويسنده , , C، نويسنده ,
Abstract :
The absolute amount of deuterium in amorphous deuterated carbon (a-C:D) layers has been measured by six laboratories with different techniques, such as MeV ion beam analysis, secondary ion mass spectrometry (SIMS), and thermal desorption spectrometry (TDS). The a-C:D layers have been deposited from a CD4 glow discharge plasma onto carbon and silicon substrates. The results for the absolute numbers obtained with the different analysing techniques show a scatter of up to about 35% around the average value. These deviations are larger than the errors stated by the experimentalists and indicate possible systematic uncertainties in some of the measurements.
