Preparation of carbon fibers/carbon/alumina tubular composite membranes and their applications in treating Cu-CMP wastewater by a novel electrochemical process

In this study, the alumina substrate was first prepared by the extrusion method, then followed by poly-vinylydenchloride (PVDC) film wrapping, PVDC carbonization, catalyst precursor coating, and the chemical vapor deposition (CVD) process to grow carbon fibers on the carbon interlayer. The carbon fibers/carbon/alumina tubular composite membranes (CCA-TCMs) thus obtained, with a pore size distribution ranging from 2 to 10 nm, were further characterized by scanning electron microscopy, transmission electron microscopy, and permporometry. A prepared CCA-TCM of this kind was incorporated into a novel simultaneous crossflow electrocoagulation and electrofiltration (EC/EF) treatment module to evaluate its capability in treating Cu-CMP (chemical mechanical polishing) wastewater. Crossflow EC/EF performance tests were carried out based on the 23−1 fractional factorial design using the electric field strength, crossflow velocity, and transmembrane pressure (TMP) as the experimental factors. Under the optimal operating conditions, the CCA-TCM associated EC/EF treatment module is capable of treating Cu-CMP wastewater in a proper manner. Permeate thus obtained had a turbidity of below 1 NTU and the removal efficiencies of total solids content, total organic carbon, copper, and silicon for Cu-CMP wastewater were 72%, 81%, 92%, and 87%, respectively.