Title of article
New fit formulae for the sputtering yield
Author/Authors
Eckstein، نويسنده , , W. and Preuss، نويسنده , , R.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
5
From page
209
To page
213
Abstract
New fit formulae for the energy and angular dependencies of the sputtering yield are proposed. Though they are empirical they give a better description of yield data, especially near the threshold for the energy dependence and at low mass ratios for the angular dependence. The new formula for the energy dependence was applied to determine threshold energies for different mass ratios.
Journal title
Journal of Nuclear Materials
Serial Year
2003
Journal title
Journal of Nuclear Materials
Record number
1358119
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