Title of article :
New fit formulae for the sputtering yield
Author/Authors :
Eckstein، نويسنده , , W. and Preuss، نويسنده , , R.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Pages :
5
From page :
209
To page :
213
Abstract :
New fit formulae for the energy and angular dependencies of the sputtering yield are proposed. Though they are empirical they give a better description of yield data, especially near the threshold for the energy dependence and at low mass ratios for the angular dependence. The new formula for the energy dependence was applied to determine threshold energies for different mass ratios.
Journal title :
Journal of Nuclear Materials
Serial Year :
2003
Journal title :
Journal of Nuclear Materials
Record number :
1358119
Link To Document :
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