Author/Authors :
Zimin، نويسنده , , A.M and Danelyan، نويسنده , , L.S and Elistratov، نويسنده , , N.G and Gureev، نويسنده , , V.M and Guseva، نويسنده , , M.I and Kolbasov، نويسنده , , B.N. and Kulikauskas، نويسنده , , V.S and Stolyarova، نويسنده , , V.G and Vasiliev، نويسنده , , N.N and Zatekin، نويسنده , , V.V، نويسنده ,
Abstract :
Quantitative characteristics of Be-sputtering by hydrogen isotope ions in a magnetron sputtering system, the microstructure and composition of the sputtered and re-deposited layers were studied. The energies of H+ and D+ ions varied from 200 to 300 eV. The ion flux density was ∼3 × 1021 m−2 s−1. The irradiation doses were up to 4 × 1025 m−2. For modeling of the sputtered Be-atom re-deposition at increased deuterium pressures (up to 0.07 torr), a mode of operation with their effective return to the Be-target surface was implemented. An atomic ratio O/Be ≅ 0.8 was measured in the re-deposited layers. A ratio D/Be decreases from 0.15 at 375 K to 0.05 at 575 K and slightly grows in the presence of carbon and tungsten. The oxygen concentration in the sputtered layers does not exceed 3 at.%. The atomic ratio D/Be decreases there from 0.07 to 0.03 at target temperatures increase from 350 to 420 K.
