Title of article :
Atmospheric aging and thermal annealing effects in a-C:H thin films
Author/Authors :
Manage، نويسنده , , Dammika P and Perz، نويسنده , , John M and Gaspari، نويسنده , , Franco and Sagnes، نويسنده , , Emmanuel and Zukotynski، نويسنده , , Stefan، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Pages :
8
From page :
247
To page :
254
Abstract :
Atmospheric aging and thermal annealing effects have been studied in hydrogenated amorphous carbon (a-C:H) thin films deposited using a dc saddle field glow discharge technique with different ion energies (85–225 eV) during deposition. The a-C:H films grown with low ion energies showed aging effects when they were exposed to the ambient atmosphere. Infrared (IR) absorption due to O–H and CO vibration modes increased while the IR absorption due to C–H vibrations decreased with aging. The absence of absorption due to O–D vibrations in deuterated films indicates that the films reacted with water rather than oxygen when exposed to the atmosphere. The C–H and O–H bond concentrations decreased when the a-C:H films which had been exposed to the atmosphere for a one month period were thermally annealed. The a-C:H films grown with high ion energies exhibited neither atmospheric aging nor thermal annealing effects.
Journal title :
Journal of Non-Crystalline Solids
Serial Year :
2000
Journal title :
Journal of Non-Crystalline Solids
Record number :
1363189
Link To Document :
بازگشت