XANES study on coordination geometry of implanted Cu+ ions in silica glass: dependence on doses

The coordination structure of Cu atoms has been studied in Cu+-ion-implanted glasses and (O+ + Cu+)-ion-implanted glasses at doses from 1 × 1016 to 1 × 1017 Cu+ ions/cm2 and from 5 × 1015 to 5 × 1016 O+ ions/cm2. It was found that Cu atoms were present as Cu(I) and their coordination geometry depended on dose through the concentration of oxygen deficiency per silicon atom.