Optical and spectroscopic characterization of germanium selenide glass films

A previews study of germanium selenide glass films by scanning electron microscopy and atomic force microscopy revealed a heterogeneous surface morphology consisting of granular regions ∼15–50 nm in size, which cause high optical losses. The present work was performed in order to further characterize such materials using spectroscopic ellipsometry, infrared (IR) and Raman spectroscopies. Chalcogenide glass films with GeSe2, Ge28Sb12Se60 and GeSe compositions have been deposited on single crystal silicon and silica glass substrates by vacuum thermal evaporation. The film thickness and the optical constants were obtained from spectroscopic ellipsometry using the Tauc-Lorenz dispersion formula. A model was derived for the film structure, which included a roughness layer at the surface. This top layer was found to have a thickness of ∼5–15 nm, of the order of the size of the granular regions previously reported. The optical bandgap of the samples increased with increasing selenium content, while the refractive index decreased. Despite a previous report of large scale phase separation in bulk Ge26Sb14Se60 glass, the fundamental IR and Raman spectra obtained in the present work did not provide any clear evidence for such phase separation which could be associated with the heterogeneous nanostructure observed at the surface of the films.