Title of article :
Order and disorder in edge-supported pure amorphous Si and pure amorphous Si on Si(001)
Author/Authors :
Xie، نويسنده , , R. and Long، نويسنده , , G.G. and Weigand، نويسنده , , S.J. and Moss، نويسنده , , S.C. and Roorda، نويسنده , , S.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2011
Abstract :
We report results from an investigation into hidden anisotropy in pure fully-dense amorphous silicon. For amorphous silicon in intimate contact with a crystalline Si(001) substrate, one can reasonably expect that the interface with the substrate may impose anisotropy in the form of distorted ordering within the film. Indeed, we found four-fold periodic intensity variations, with bimodal intensity centered along the substrate c-Si < 110> directions, in the X-ray scattering from a-Si on Si(001). These well-defined intensity variations disappeared entirely in X-ray scattering from edge-supported a-Si films, where there was no detectable anisotropy.
Keywords :
Ion-implantation amorphization , amorphous silicon , Low angle X-ray scattering
Journal title :
Journal of Non-Crystalline Solids
Journal title :
Journal of Non-Crystalline Solids