Title of article
Optical grating recording in ChG thin film by electron beam
Author/Authors
Kolbjonoks، نويسنده , , V. and Gerbreders، نويسنده , , V. and Teteris، نويسنده , , J. and Gerbreders، نويسنده , , A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
3
From page
169
To page
171
Abstract
Recording capabilities of AsSeS chalcogenide (ChG) glasses using electron beam (EB) lithography have been investigated in this study. After exposure with EB the thin films of these inorganic glasses can be etched in alkaline amine solvent with high selectivity. High resolution, smooth shaped structures have been fabricated using ChG thin films. Height of developed pattern can be controlled through changing applied electron dose.
Keywords
Amorphous thin films , chalcogenides , EB lithography
Journal title
Journal of Non-Crystalline Solids
Serial Year
2013
Journal title
Journal of Non-Crystalline Solids
Record number
1384483
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