Aerosol synthesis of silicon nanoparticles with narrow size distribution—Part 2: Theoretical analysis of the formation mechanism

This work investigates the mechanisms which lead to the formation of silicon nanoparticles with narrow size distributions by means of population balance modeling. The model accounts for the full aerosol process, including chemical reaction, nucleation from supersaturated vapor, growth and agglomeration. The results are in good agreement with experimental data. The effects of the process parameters temperature, silane concentration and reactor total pressure are systematically investigated. The simulation allows an in-depth insight into the particle formation mechanism and reveals the key requirements which are necessary for the generation of narrow particle size distributions. In this mechanism, only a short nucleation burst occurs, while surface growth plays the dominant role in silane precursor consumption. A key role is attributed to condensation, because the numerical calculations can only reflect the experimental observations, if the condensation mechanism is included in the model.