Model for thermoelastic actuation of an axisymmetric isotropic circular plate via an internal harmonic heat source

This paper presents a reduced analytical modeling method for the initial optimal design of thermoelastic micromachined actuators. The key aspects of the model are a Green’s function formulation of the axisymmetric heat conduction equation that incorporates an internal heat source and the solution of the thermoelastically forced bending wave equation. Model results of a representative thermoelastic structure include transient temperature and sinusoidal steady state transverse displacement. Comparison with finite element analysis shows excellent agreement with favorable computational costs. Model constraints at low frequencies are identified and discussed. The computational efficiency of the analytical model makes it a more viable modeling method for design optimization.