Thermoelastic damping of the axisymmetric vibration of circular plate resonators

Thermoelastic damping is recognized as a significant loss mechanism at room temperature in micro-scale circular plate resonators. In this paper, the governing equations of coupled thermoelastic problems are established for axisymmetric out-of-plane vibration of circular plate. Then the analytical expression for thermoelastic damping is obtained. The effects of environmental temperature, plate dimensions and boundary conditions on the thermoelastic damping are studied.