Snap-through and pull-in analysis of an electro-dynamically actuated curved micro-beam using a nonlinear beam model

This paper presents a geometrically nonlinear micro-beam model for the electro-dynamic analysis of an initially curved micro-beam under an applied voltage, with an emphasis on its snap-through and pull-in behaviors. The governing equations of motion and the associated boundary conditions are derived in an arc coordinate system without involving any assumptions on the nonlinear deformation. Differential quadrature method (DQM) and Petzold-Gear Backward Differentiation Formulas (BDF) are employed to solve the governing equations in the space and time domains respectively to obtain the nonlinear fundamental frequency, snap-through voltage, pull-in voltage and the corresponding mode shapes of a micro-beam clamped at both ends. The present analysis is validated through a direct comparison with the published experimental and numerical results. A parametric study is conducted to investigate the influences of the initial gap, base length, arc rise, and initial curved configuration on the snap-through and pull-in behaviors of the micro-beam.