Characterization of (Ti1−xAlx)N films prepared by radio frequency reactive magnetron sputtering

(Ti1−xAlx)N films were deposited by radio frequency reactive magnetron sputtering on a high speed steel substrate. The structure and composition of the coatings were analysed by various techniques. Hardness and adhesion of the films were investigated using Vickers micro-indentation and scratch test respectively, whereas their tribological properties were studied using a pin-on-disk tribometer. The results show that increasing aluminium content leads to increase hardness of the films and to decrease their wear resistance when sliding against a magnesia-stabilized zirconia ball. On the contrary, no clear dependence of the film adhesion on the aluminium concentration was detected.