Effect of fatigue on the pyroelectric and dielectric properties of PZT films

Sol-gel derived lead zirconate titanate (PbZr0.52Ti0.48O3) films of thickness 1 μm were deposited on RuO2/SiO2/Si and Pt/Ti/SiO2/Si substrates. The crystallization of the films was studied by X-ray diffraction. The pyroelectric coefficient and dielectric permittivity of the PZT films were also investigated. It is well known that the use of oxide electrodes can reduce fatigue in PZT thin films. In this work, the effect of fatigue on the dielectric and pyroelectric properties of 1 μm thick PZT films was studied by comparing these properties before and after fatigue tests. As a fatigued film has lower switchable polarization, this study will reveal the correlation between dielectric and pyroelectric properties of PZT films and switchable polarization.