Airflow deposition of oxide electroceramic films

Thick films of several oxide ceramic compositions based on lead zirconate titanate (PZT), barium titanate, and zinc oxide were fabricated by deposition from an airflow at room temperature. The as-deposited films showed green densities close to 80% theoretical for all compositions. Unfired, poled PZT-based films provided an audible acoustic response, and some PZT and BaTiO3 compositions formed translucent layers. X-ray diffraction revealed no preferred crystallographic orientation of the particles in the films. High green densities and increased particle surface energies were thought to operate as drivers for significant reductions in sintering temperature, final grain size, and shrinkage. Films of PZT–PMN (lead magnesium niobate)-Pb5Ge3O11, sintered at 750 °C, had a density of 99.5% theoretical, and relative permittivities greater than 2000. ZnO-based varistor films exhibited higher breakdown fields than equivalent bulk samples prepared by conventional routes.