PVP-assisted sol-gel deposition of single layer ferroelectric thin films over submicron or micron in thickness

PZT, BaTiO3 and BaBi4Ti4O15 films were prepared on Pt/Ti/SiO2/Si substrates by spin-coating using alkoxide solutions containing polyvinylpyrrolidone (PVP). Deposition and firing of the gel films were performed just once, not repeated. Crack-free, single-phase PZT, BaTiO3 and BaBi4Ti4O15 films as thick as 2.2, 0.77 and 0.40 μm could be prepared, respectively, via non-repetitive spin-coating. The 2.2 μm thick PZT film exhibited P–E hysteresis with remanent polarization and coersive field of 21 μC cm−2 and 90 kV cm−1, respectively. The dielectric constant of the PZT, BaTiO3 and BaBi4Ti4O15 films were 370, 310 and 380, respectively, at 1 kHz.