Low-temperature sintering behavior of the nano-sized AlN powder achieved by super-fine grinding mill with Y2O3 and CaO additives

For low-temperature sintering, mixtures of AlN powder doped with 3.53 mass% Y2O3 and 0–2.0 mass% CaO as sintering additives were pulverized and dispersed in a vertical super-fine grinding mill with very small ZrO2 beads. The particle sizes achieved ranged between 50 and 100 nm after grinding for 90 min. The mixtures were then fired at 1000–1500 °C for 0–6 h under nitrogen gas pressure of 0.1 MPa. All nano-sized powders showed pronounced densification from 1300 °C as revealed by shrinkage measurement. The larger amounts of sintering additives enhanced AlN sintering at lower temperatures. Densified AlN ceramics with very fine and uniform grains of 0.3–0.4 μm were obtained at a firing temperature of 1500 °C for 6 h.