Dielectric properties of amorphous BaTiO3 films deposited by RF magnetron sputtering

In the present paper, dielectric properties of a-BaTiO3 films have been investigated as a function of frequency (10−1 to 105 Hz) and temperature (25–350 °C) using the dielectric spectroscopy technique. Relaxation and ac-conductivity processes were analyzed in order to study charge transport in the bulk and at the electrode-film interfaces. It seems that the oxygen vacancies play an essential role in both processes.