Comparison of the pH sensitivity of different surfaces on tantalum pentoxide

In this study, we have observed the roughness of the surfaces of amorphous tantalum pentoxide (a-Ta2O5) using Atomic Force Microscopy. The electrolyte-oxide-semiconductor (EOS) structure of a-Ta2O5/SiO2/p-Si/Al which was immersed in the different buffer solutions (pH=1–pH=13) measured the capacitance and calculated the pH-sensitivity of a-Ta2O5 of the different reacting pressures. Furthermore, the relationship between the roughness of the surface and the pH-sensitivity of a-Ta2O5 is presented in this paper.