Title of article
Preparation and characterisation of titanium–tungsten sensors
Author/Authors
Guidi، نويسنده , , V and Boscarino، نويسنده , , D and Comini، نويسنده , , E and Faglia، نويسنده , , G and Ferroni، نويسنده , , M and Malagù، نويسنده , , C and Martinelli، نويسنده , , G and Rigato، نويسنده , , V and Sberveglieri، نويسنده , , G، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
3
From page
264
To page
266
Abstract
Thin films of W–Ti–O mixed oxides were prepared by reactive r.f. sputtering of various Ti/W targets. Depending on the Ti/W content and annealing temperature, nanosized films with different polycrystalline structure were achieved. The layers exhibit good sensing capability to NO2 with scarce influence by CO.
Keywords
Gas-sensor , sputtering , TiO , WO3
Journal title
Sensors and Actuators B: Chemical
Serial Year
2000
Journal title
Sensors and Actuators B: Chemical
Record number
1410912
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